高精度微机电陀螺研究现状与发展趋势

MEMS gyroscopes are widely used in industry and defense field equipment due to advantages such as small volume, light weight, and low cost. The use of a high-precision MEMS gyroscope can improve the accuracy of attitude measurement and provide control for a wide range of equipment and platforms, and it is expected to solve the problem of autonomous navigation in complex environments for unmanned vehicles, aerial vehicles, and other equipment. Owing to its appealing development prospects, the high-precision MEMS gyroscope remains one of the widely researched topics in the field of inertial technology. However, developing a high-precision MEMS gyroscope is challenging. First, this paper examines the evolution rules of the structure of a high-precision MEMS gyroscope, thus categorizing it as a mass block structure and spinning symmetric structure for performance analysis and comparison. Second, to improve the quality of the MEMS gyroscope resonator, this paper highlights the methods for improving the quality factor and adjusting the frequency of the microresonant structure and then introduces the research status of high-precision MEMS gyroscope control technology based on the rate mode, rate integrated mode, and frequency modulation mode. Finally, the future development and application trends of high-precision MEMS gyroscopes are anticipated.