Decoupling of two-axis electrostatically-actuated 3D MEMS mirror

The 3D MEMS optical switches are able to build dynamically reconfigurable, highly-scalable physical layer and to provide a required growing network bandwidth and agility for various service providers, datacenters, cloud computing networks, etc. The switch utilizes highly reflective miniature mirrors to manipulate an optical signal inside the switch directly without any conversions. Nevertheless, as indicated by the simulation results of this paper, many of developed mirrors are not optimized in the sense of dynamic behavior well. The coupling nature of mirror rotation makes its control difficult. In this paper, we present a simple optimization technique leading to decoupled rotation of the mirror about two perpendicular axes.