Solution pH Effect on Drain-Gate Characteristics of SOI FET Biosensor

Nanowire or nanobelt sensors based on silicon-on-insulator field-effect transistors (SOI-FETs) are one of the leading directions of label-free biosensors. An essential issue in this device construction type is obtaining reproducible results from electrochemical measurements. It is affected by many factors, including the measuring solution and the design parameters of the sensor. The biosensor surface should be charged minimally for the highest sensitivity and maximum effect from interaction with other charged molecules. Therefore, the pH value should be chosen so that the surface has a minimum charge. Here, we studied the SOI-FET sensor containing 12 nanobelt elements concatenated on a single substrate. Two types of sensing elements of similar design and different widths (0.2 or 3 μm) were located in the chips. The drain-gate measurements of wires with a width of 3 µm are sufficiently reproducible for the entire chip to obtain measurement statistics in air and deionized water. For the pH values from 3 to 12, we found significant changes in source-drain characteristics of nanobelts, which reach the plateau at pH values of 7 and higher. High pH sensitivity (ca. 1500 and 970 mV/pH) was observed in sensors of 3 μm and 0.2 μm in width in the range of pH values from 3 to 7. We found a higher “on” current to “off” current ratio for wide wires. At all studied pH values, Ion/Ioff was up to 4600 and 30,800 for 0.2 and 3 μm wires, respectively. In the scheme on the source-drain current measurements at fixed gate voltages, the highest sensitivity to the pH changes reaches a gate voltage of 13 and 19 V for 0.2 μm and 3 μm sensors, respectively. In summary, the most suitable is 3 μm nanobelt sensing elements for the reliable analysis of biomolecules and measurements at pH over 7.