Analytical Analysis of Flexible Microfluidic Based Pressure Sensor Based on Triple-Channel Design

In designing a flexible microfluidic-based pressure sensor, the microchannel plays an important role in maximizing the sensor's performance. Similarly, the material used for the sensor's membrane is crucial in achieving optimal performance. This study presents an analytical analysis and FEA simulation of the membrane and microchannel of the flexible pressure sensor, aimed at optimizing it design and material selection. Different types of materials, including two commonly used polymers, Polyimide (PI) and Polydimethylsiloxane (PDMS) were evaluated. Moreover, different designs of the microchannel, including single-channel, double-channel, and triple-channel, were analyzed. The applied pressure, width of the microchannel, and length of the microchannel were varied to study the normalized resistance of the microchannel and maximize the performance of the pressure sensor. The results showed that the triple-channel design produced the highest normalized resistance. To achieve maximum performance, it is found that using a membrane with a large area facing the applied pressure was optimal in terms of dimensions. In conclusion, optimizing the microchannel and membrane design and material selection is crucial in improving the overall performance of flexible microfluidic-based pressure sensors.