Calculation Method of Target Erosion in the Planar DC Magnetron Sputtering

The method of prediction of targets erosion in Direct Current Magnetron Sputtering System(DC-MSS) is suggested. The calculation model assume that the distribution of plasma is the same as the horizontal magnetic field distribution of magnetron. We use COMSOL Multiphysics to simulate the horizontal magnetic field and divide it into tangential and radial components. The radial magnetic field is independent of velocity, and we calculate the target erosion based on the static state of the magnetron. The tangential magnetic field is related to velocity, and we calculate the target erosion based on the rotation state of the magnetron. Finally, we will sum the radial and tangential magnetic field to obtain the target erosion. The calculated target erosion is in very good agreement with the measured of a real large size target used. This calculation method will be valuable in designing the magnet arrangement of a magnetron in DC-MSS.