微透镜
制作
材料科学
纳米技术
溶胶凝胶
石英玻璃
光学
光电子学
复合材料
镜头(地质)
物理
医学
病理
替代医学
作者
J.-B. Orhan,Virendra K. Parashar,A. Sayah,Martin A. M. Gijs
标识
DOI:10.1016/j.mee.2006.01.045
摘要
We present a novel technological approach for the realization of three-dimensional microlens arrays in sol-gel glass. Hundred micron thick cylindrical SU-8 structures are used to generate a polydimethylsiloxane (PDMS) mold that is subsequently filled with AZ 4562 photoresist. During a thermal softening process, the upper part of the photoresist cylinder transforms into a spherical-like shape. An in-house developed sol-gel material with low shrinkage is then used to replicate via a second PDMS mold the photoresist lenses into crack-free glass structures with optical quality.
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