Optomechanically Actuated Microcilia for Locally Reconfigurable Surfaces

Abstract Artificial microcilia structures have shown potential to incorporate actuators in various applications such as microfluidic devices and biomimetic microrobots. Among the multiple possibilities to achieve cilia actuation, magnetic fields present an opportunity given their quick response and wireless operation, despite the difficulty in achieving localized actuation because of their continuous distribution. In this work, a high‐aspect‐ratio (>8), elastomeric, magnetically responsive microcilia array is presented that allows for wireless, localized actuation through the combined use of light and magnetic fields. The microcilia array can move in response to an external magnetic field and can be locally actuated by targeted illumination of specific areas. The periodic pattern of the microcilia also diffracts light with varying diffraction efficiency as a function of the applied magnetic field, showing potential for wirelessly controlled adaptive optical elements.