覆盖层
纳米线
材料科学
X射线光电子能谱
化学气相沉积
分析化学(期刊)
氧气
光致发光
氧化锡
氩
纳米结构
等离子体刻蚀
化学工程
氧化物
纳米技术
蚀刻(微加工)
化学
光电子学
图层(电子)
物理化学
工程类
有机化学
冶金
色谱法
作者
Jun Pan,Rajesh Ganesan,Hao Shen,Sanjay Mathur
摘要
Tin oxide (SnO2) nanowires grown by chemical vapor deposition were modified by Ar/O2 plasma treatment through preferential etching of the lattice oxygen atoms, which produced nonstoichiometric surface compositions that imparted a manyfold higher sensitivity toward gas absorption on such surfaces. Microstructures of as-grown and plasma-treated SnO2 nanowires confirmed the gradual change in the chemical composition and morphologies. Surficial disorder caused by the bombardment of argon and oxygen ions present in the plasma was visible as a disordered overlayer in high-resolution TEM micrographs, when compared to single crystalline as-grown SnO2 nanowires. Gas-sensing experiments on modified SnO2 nanostructures showed higher sensitivity for ethanol gas at lower operating temperatures and exhibited an improved transduction response toward changing gas atmospheres, attributed to the increased concentration of oxygen vacancies on the surface of SnO2 nanowires. Modulation of surface chemistry was also supported by photoluminescence and X-ray photoemission spectroscopy studies.
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