Effect of curvature on dynamic behavior of cantilever MEMS

A study on the effect of curvature of cantilever MEMS is presented. A 3-D model is developed in ANSYS, the model presents the dynamic behavior of cantilever MEMS. Different types of geometrically configured cantilever MEMS are analyzed. The results include the variation of fundamental frequency and other higher natural frequencies with respect to curvature of cantilevers