Titanium dioxide coated photoinduced surface-relief grating as a resonant waveguide grating

The authors present a new sinusoidal resonance waveguide grating (RWG) that has a TE resonance peak at 1550 nm wavelength. Numerical simulations with the Fourier modal method (FMM) were used to design the RWG to the correct wavelength. Applying ALD TiO ₂ coating on the patterned polymer surface can make a durable and more accurately designed RWG. The grating can be measured prior to ALD coating and the thickness can be adjusted accordingly.