材料科学
双极扩散
晶体管
光电子学
双层
平版印刷术
制作
半导体
纳米技术
图层(电子)
有机半导体
软光刻
电气工程
物理
替代医学
电压
病理
工程类
生物
等离子体
医学
量子力学
遗传学
膜
作者
Sangyoon Oh,Sang Kyu Park,Soo Young Park
标识
DOI:10.1002/aelm.202101041
摘要
Abstract In spite of the large potential of ambipolar transistors constituted of laterally aligned unipolar n‐/p‐channel semiconductors, it is hard to secure the full electrical performance of each semiconductor channel by the risk of intermixing which leads to low crystallinity. Here, a novel fabrication process of patterned taping is proposed which ensures the formation of sharp interface and thus preserving the original performance of individual channels—laterally aligned micro n‐/p‐channels via all‐dry soft‐lithographic process. Different from other bi‐component active layer devices, such as vertically stacked n‐/p‐bilayer and n‐/p‐blend film, laterally aligned n‐/p‐channel of this work secures clear ambipolarity because both the n‐/p‐channels are directly laid over a common gate dielectric surface. Essentially, laterally aligned n‐/p‐channels constructed by patterned taping are free from lateral channel mixing or broadening effect different from other processes such as wet‐processing and fine metal mask (FMM) patterning. In this work, a novel patterned taping method of laterally aligned n‐/p‐channel transistors and also their optimized transistor performances compared with other bi‐component devices using the same set of n‐ and p‐type semiconductor materials is demonstrated.
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