材料科学
化学气相沉积
氧化物
等离子体
多晶硅耗尽效应
分析化学(期刊)
光电子学
化学
冶金
电气工程
晶体管
栅氧化层
物理
环境化学
量子力学
电压
工程类
作者
Verena Mertens,Silke Dorn,Jonathan Langlois,Maximilian Stöhr,Yevgeniya Larionova,Welmoed Veurman,Rolf Brendel,Norbert Ambrosius,Aaron Vogt,Thomas Pernau,Helge Haverkamp,Thorsten Dullweber
标识
DOI:10.1002/solr.202300919
摘要
In this paper we investigate different in situ grown P lasma E nhanced C hemical V apor D eposition (PECVD) grown interfacial oxides for n ‐type polysilicon passivating contacts. We apply SiO x (N y )/ n ‐type amorphous silicon stacks created from either N 2 O plasma or O 2 plasma to POLO IBC solar cells using our structured deposition process through a glass mask to create the IBC layout. We determine experimentally the impact of plasma exposure time for interfacial oxide growth on solar cell efficiencies. The POLO IBC cell results show that the PECVD oxides SiO x N y and SiO x with optimized plasma exposure time give similar maximum efficiencies of 23.8 % and 23.7 %, respectively. These data demonstrate the feasibility to deposit a high‐quality in situ PECVD interfacial SiO x (N y ) layers for surface passivation and current transport of passivated contacts at the same time. For the SiO x / n ‐type polysilicon stack we find that both, plasma exposure time for interfacial oxide growth or polysilicon anneal temperature variations, can lead to similar optimum of solar cell efficiencies. We analyze the current V oc losses due to metallization for our solar cells and calculate a realistic to achieve efficiency of 25.22 % for an optimized POLO IBC solar cells applying the S ynergistic E fficiency G ain A nalysis (SEGA) on Quokka3 simulations. This article is protected by copyright. All rights reserved.
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