热辐射计
响应度
材料科学
光学
光电子学
超材料
噪声等效功率
超材料吸收剂
比探测率
光刻
电子束光刻
红外线的
探测器
物理
光电探测器
抵抗
纳米技术
可调谐超材料
图层(电子)
作者
Chunxu Chen,Yuwei Huang,Ke Wu,Thomas G. Bifano,Stephan W. Anderson,Xiaoguang Zhao,Xin Zhang
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2020-08-27
卷期号:28 (20): 28843-28843
被引量:24
摘要
Detecting low energy photons, such as photons in the long-wave infrared range, is a technically challenging proposition using naturally occurring materials. In order to address this challenge, we herein demonstrate a micro-bolometer featuring an integrated metamaterial absorber (MA), which takes advantage of the resonant absorption and frequency selective properties of the MA. Importantly, our micro-bolometer exhibits polarization insensitivity and high absorption due to a novel metal-insulator-metal (MIM) absorber design, operating at 8-12 µm wavelength. The metamaterial structures we report herein feature an interconnected design, optimized towards their application to micro-bolometer-based, long-wave infrared detection. The micro-bolometers were fabricated using a combination of conventional photolithography and electron beam lithography (EBL), the latter owing to the small feature sizes within the design. The absorption response was designed using the coupled mode theory (CMT) and the finite integration technique, with the fabricated devices characterized using Fourier-transform infrared spectroscopy (FTIR). The metamaterial-based micro-bolometer exhibits a responsivity of approximately 198 V/W over the 8-12 µm wavelength regime, detectivity of ∼ 0.6 × 109 Jones, thermal response time of ∼ 3.3 ms, and a noise equivalent temperature difference (NETD) of ∼33 mK under 1mA biasing current at room-temperature and atmosphere pressure. The ultimate detectivity and NETD are limited by Johnson noise and heat loss with thermal convection through air; however, further optimization could be achieved by reducing the thermal conductivity via vacuum packaging. Under vacuum conditions, the detectivity may be increased in excess of two-fold, to ∼ 1.5 × 109 Jones. Finally, an infrared image of a soldering iron was generated using a single-pixel imaging process, serving as proof-of-concept of this detection platform. The results presented in this work pave the road towards high-efficiency and frequency-selective detection in the long-wave infrared range through the integration of infrared MAs with micro-bolometers.
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