Formation of Titanium Nitride Layers and Composite Layers under Glow Discharge Conditions

By applying a glow discharge in a gaseous mixture composed of TiCI 4 , H 2 , and N 2 it is possible to produce titanium nitride layers or – if the process is conducted in two stages differing in the atmospheres used – composite layers, e.g. a nitrided layer covered by a titanium nitride layer. Electric activation of the gaseous medium and of the surface under treatment makes it possible to reduce the treatment temperature to ∼600°C.An installation is described for producing titanium nitride layers and composite layers and the results of structural examinations and wear tests performed on these layers are presented.