材料科学
退火(玻璃)
磁各向异性
金属
各向异性
图层(电子)
溅射
凝聚态物理
核磁共振
纳米技术
磁化
薄膜
复合材料
磁场
冶金
光学
物理
量子力学
作者
der-sheng Lee,Hao-Ting Chang,Chih‐Wei Cheng,G. Chern
标识
DOI:10.1109/tmag.2014.2298243
摘要
High perpendicular magnetic anisotropy (PMA) has been recently revealed in CoFeB/MgO/CoFeB tunnel junctions if the thickness of CoFeB is <;1.5 nm. However, PMA has been observed in MgO/CoFeB/Ta but not in MgO/CoFeB/Ru, indicating a metallic cap layer effect. In this paper, we extend the study to MgO/CoFeB(0.8-1.8 nm)/Nb(1.3 nm) by sputtering and find that the magnetic behavior of MgO/CoFeB/Nb resembles the magnetic behavior of MgO/CoFeB/Ta. The interface anisotropy constant of both MgO/CoFeB/Ta and MgO/CoFeB/Nb is ~2.2 erg/cm 2 while MgO/CoFeB/Ru has a much weaker interface anisotropy constant ~0.68 erg/cm 2 . In addition, the magnetic dead layer (MDL) of MgO/CoFeB/cap (cap = Ta and Nb) is ~0.1 nm while MgO/CoFeB/Ru has a much larger MDL ~0.5 nm. The metallic layer effect on the PMA in CoFeB/MgO-based perpendicular structure is attributed to the interdiffusion during the post-annealing process. The possible correlation between PMA and MDL provides a possible mechanism for the metal layer effect in the CoFeB/MgO-based structures.
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