薄脆饼
材料科学
威布尔分布
威布尔模量
极限抗拉强度
复合材料
垂直的
单晶硅
无损检测
硅
光弹性
压力(语言学)
结构工程
抗弯强度
光电子学
固体力学
几何学
工程类
放射科
统计
哲学
医学
语言学
数学
作者
Logan Perris Rowe,Alexander J. Kaczkowski,Tung-Wei Lin,Gavin P. Horn,Harley T. Johnson
出处
期刊:Journal of Engineering Materials and Technology-transactions of The Asme
[American Society of Mechanical Engineers]
日期:2021-10-08
卷期号:144 (3)
摘要
Abstract A nondestructive photoelastic method is presented for characterizing surface microcracks in monocrystalline silicon wafers, calculating the strength of the wafers, and predicting Weibull parameters under various loading conditions. Defects are first classified through thickness infrared photoelastic images using a support vector machine-learning algorithm. Characteristic wafer strength is shown to vary with the angle of applied uniaxial tensile load, showing greater strength when loaded perpendicular to the wire speed direction than when loaded along the wire speed direction. Observed variations in characteristic strength and Weibull shape modulus with applied tensile loading direction stem from the distribution of crack orientations and the bulk stress field acting on the microcracks. Using this method, it is possible to improve manufacturing processes for silicon wafers by rapidly, accurately, and nondestructively characterizing large batches in an automated way.
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