纳米压印光刻
支柱
纳米技术
基质(水族馆)
平版印刷术
六方晶系
材料科学
纳米结构
硅
PDMS印章
天然材料
软光刻
蚀刻(微加工)
纳米光刻
制作
光电子学
高分子科学
化学
生物
生态学
结晶学
工程类
图层(电子)
机械工程
病理
替代医学
医学
作者
Guo‐Ming Zhang,Jin Zhang,Guoyong Xie,Zhongfan Liu,Huibo Shao
出处
期刊:Small
[Wiley]
日期:2006-10-06
卷期号:2 (12): 1440-1443
被引量:276
标识
DOI:10.1002/smll.200600255
摘要
Winging it: The natural micro- and nanostructures that exist on the wings of cicadas (see image) are used as a new type of nanoimprinting lithography (NIL) stamp. NIL is used to fabricate nanowell arrays and the structures are transferred to a silicon substrate by reactive ion etching. Patterned PMMA (poly(methyl methacrylate)) is also used as a mold to fabricate hexagonal gold pillar arrays that mimick structures on cicada wings. This work demonstrates the use of natural nanostructures as a much cheaper NIL method as cicada wings are abundant and easy to obtain. Supporting information for this article is available on the WWW under http://www.wiley-vch.de/contents/jc_2296/2006/z600255_s.pdf or from the author. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.
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