原子物理学
离子
溅射
基质(水族馆)
等离子体
腔磁控管
溅射沉积
材料科学
法拉第杯
兴奋剂
分析化学(期刊)
化学
光电子学
物理
薄膜
离子束
纳米技术
有机化学
地质学
色谱法
海洋学
量子力学
作者
Yoshinobu Matsuda,Koki Watanabe,Shoma Uzunoe,Tomohiro Furusato
标识
DOI:10.35848/1347-4065/acddf0
摘要
Abstract The energy distribution function of the substrate incident negative ions during magnetron sputtering of a metal-doped zinc oxide target was measured using a home-made retarding field energy analyzer (RFEA) with a magnetic field region. The cross-field region in front of the RFEA injection aperture allows the bulk electrons in the plasma into the RFEA are dramatically suppressed, while the inflow of negative ions emitted from the oxide target is largely unaffected. Negative ions were found to be mainly emitted from the target erosion area and incident on the opposing substrate with ion energy equivalent to the target applied voltage. Compared to energy-resolved mass spectrometers, which require differential pumping and are large and not very portable, magnetized RFEA is inexpensive, compact and easy to sweep in space, although there is no mass separation.
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