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70 积分 2026-05-19 加入
A Novel Dry Selective Etch of SiGe for the Enablement of High Performance Logic Stacked Gate-All-Around NanoSheet Devices
13天前
已完结
A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness
1个月前
已完结
Control of selective SiGe etching by enhanced formation of hydroxyl radicals and by surface passivation in peracetic acid solution
3个月前
已完结
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