Lv3
230 积分 2024-03-15 加入
Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors
6小时前
已完结
Plasma etching of the trench pattern with high aspect ratio mask under ion tilting
6小时前
已完结
Investigation on the parameter distribution of Ar/O2 inductively coupled plasmas
2个月前
已完结
Plasma source development for fusion-relevant material testing
2个月前
已完结
Application of high-spatial-resolution distributed fiber-optic sensing technique for neutral gas temperature mapping in inductively coupled Ar plasmas
2个月前
已关闭
Effect of a DC gradient magnetic field on electron density in a weakly magnetized inductively coupled plasma
2个月前
已关闭
Application of high-spatial-resolution distributed fiber-optic sensing technique for neutral gas temperature mapping in inductively coupled Ar plasmas
2个月前
已关闭
Physical performance analysis and progress of the development of the negative ion RF source for the ITER NBI system
3个月前
已完结
The low pressure Cl2/O2discharge and the role of ClO
4个月前
已完结
The ion energy distribution in a planar inductive oxygen discharge
4个月前
已完结
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