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180 积分 2024-03-15 加入
Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges
1小时前
已完结
Silicon nitride spacer etching selectively to silicon using CH3F/O2/He/SiCl4 plasma
1小时前
已完结
Effect of O2 dilution and substrate temperature on the etching of SiNx in a C4F6/Ar plasma
1小时前
求助中
Ion energy distribution control in single and dual frequency capacitive plasma sources
1个月前
已完结
Kinetic simulations of low temperature plasmas used for plasma processing
2个月前
已完结
Impact of inductively coupled plasma injection on capacitively coupled plasma with a ring-shaped hollow cathode using methane and hydrogen mixture gases
2个月前
已关闭
ICP argon discharge simulation: The role of ion inertia and additional RF bias
2个月前
已完结
Ion motion above a biased wafer in a plasma etching reactor
2个月前
已完结
Ion energy and angular distributions in planar Ar/O2 inductively coupled plasmas: hybrid simulation and experimental validation
2个月前
已完结
Ion energy distribution measurement device using a capillary plate with high-aspect ratio
2个月前
已完结
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