Lv41
470 积分 2025-11-11 加入
TEM-EDS studies on Si diffusion behavior in heteroepitaxial AlN polarity inversion structures on Si substrates
5小时前
待确认
Mechanism of point-defect-driven evolution in ferroelectricity of AlScN films
1个月前
已关闭
BAW resonators based on high-quality and low-tensile–stress single-crystalline AlN films on PVD-AlN/silicon substrates
1个月前
已完结
AlN FBARs via Thin-Film Transfer for Heterogeneous Integration
1个月前
已完结
Mechanical Mode Coupled Piezo-on-Silicon Bulk Acoustic Wave MEMS Resonators in Tank Configuration for Q-Enhancement
1个月前
已完结
Quantitative evaluation of imperfect interface effects on film bulk acoustic resonator performance from qualitative analysis
1个月前
已完结
A bilayer structure laterally excited bulk acoustic resonator with enhanced heat dissipation and acoustic properties
1个月前
已关闭
Sputtering of (001)AlN thin films: Control of polarity by a seed layer
1个月前
已完结
Electron cumulative distribution function in a magnetron sputtering discharge
2个月前
已完结
Numerical Study of Particle Deposition in Magnetron Sputtering with Electromagnetic Coil
2个月前
已关闭
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