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542 积分 2025-11-11 加入
Wafer-scale fabrication and growth mechanism investigation of silicon-based AlN piezoelectric films with c-axis orientation by magnetron sputtering
4小时前
待确认
Quasi-epitaxial Growth of Aluminum Nitride Films on (0002)-oriented Titanium Buffer Layer by Magnetron Sputtering
5小时前
求助中
Polarization-inverted structure GeAlN thin film BAW resonators using polarity control by Ar:N₂ gas ratio adjustment
7天前
已关闭
Optimization of film bulk acoustic wave resonator (FBAR) for RF filter applications
1个月前
已关闭
Surface kinetics in AlN growth: A universal model for the control of surface morphology in III-nitrides
1个月前
已完结
The polarity of AlN films grown on Si(111)
1个月前
已完结
Multipath-induced c-axis orientation of aluminum nitride films deposited using direct-current magnetron sputtering
1个月前
已完结
Investigation of Polarity Reversal of Bilayer AlN/Sc0.2Al0.8N Films and Its Influence on Film Bulk Acoustic Resonators
2个月前
已完结
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