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Cryogenic plasma etching for SiO2/SiN dielectric films: a mini review
1小时前
待确认
Ultralow-pressure inductively coupled plasma etching of high-aspect-ratio SiO2 structures: Mitigation of transport-limited etching and stable profile control
2小时前
求助中
Bacterial cellulose nanofibers reinforced with chitosan/poly-γ-glutamic acid complex for cartilage tissue scaffolding
2小时前
已完结
Etching suppression of silicon nitride by ammonium fluorosilicate formation during cryogenic NF3/NH3 plasma reactive ion etching
2小时前
已完结
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