Lv5
902 积分 2021-10-18 加入
Implant Angle Monitor System of MC3-II
1个月前
已完结
Process Robustness against Photoresist Outgassing in Single-Wafer High-Energy Implanters
1个月前
已完结
Introduction of the S-UHE, a single-wafer ultra-high energy ion implanter
1个月前
已完结
Precise beam angle control in the S-UHE, SEN's single-wafer ultra-high energy ion implanter
1个月前
已完结
Crystal-trim and its application to investigations on channeling effects during ion implantation
1个月前
已完结
Parameterization of ion channeling half-angles and minimum yields
1个月前
已完结
Stabilization and stripping of high current implanted photoresists
3个月前
已完结
Optimizing Photoresist Strip to reduce fluorine outgassing causing bubble defect
3个月前
已完结
Characterization of thin carbonized photoresist layer and investigation of dry strip process through real-time monitored variable temperature control
3个月前
已完结
Boundary conditions and solution for Si and poly-Si pitting defects induced by ion implanted PR popping during dry strip process
3个月前
已完结
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