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68 积分 2023-12-07 加入
Enhanced durability of carbon nanotube pellicles for EUV lithography
14天前
已关闭
Toward next-generation EUV pellicles: evaluating beryllium ultra-thin membranes
2个月前
已完结
Uniform and Scalable Carbon Nanotube Growth on Carbon Fibers: Insights from Experimental Dynamic Snapshots and Computational Fluid Dynamics
2个月前
已完结
Toward next-generation EUV pellicles: evaluating beryllium ultra-thin membranes
2个月前
已完结
Scan-speed trade-offs in the thermo-mechanical response of EUV pellicles under slit-scan exposure
2个月前
已完结
Thermal stress concentration points and stress mutations in nano-multilayer film structures
4个月前
已完结
Component and performance evolution of Zr filters induced by annealing and synchrotron radiation in EUV range
9个月前
已完结
Investigation of Mechanical Properties of Oxide Films on the Base Nb, Ta and Zr
9个月前
已关闭
The boundary effects on stretch-induced membrane wrinkling
9个月前
已完结
Enhancing Hydrogen Radical Resistance in Graphene-Based EUV Pellicles via Mo and Mo2C Capping Layers
10个月前
已完结
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