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Thermal stress concentration points and stress mutations in nano-multilayer film structures
16天前
已完结
Component and performance evolution of Zr filters induced by annealing and synchrotron radiation in EUV range
4个月前
已完结
Investigation of Mechanical Properties of Oxide Films on the Base Nb, Ta and Zr
4个月前
已关闭
The boundary effects on stretch-induced membrane wrinkling
5个月前
已完结
Enhancing Hydrogen Radical Resistance in Graphene-Based EUV Pellicles via Mo and Mo2C Capping Layers
6个月前
已完结
Crystalline Phase-Dependent Emissivity of MoSi2 Nanomembranes for Extreme Ultraviolet Pellicle Applications
6个月前
已完结
Composition-dependent properties of ultra-thin MoSi x based extreme ultraviolet pellicle
6个月前
已完结
Stress-induced pellicle analysis for extreme-ultraviolet lithography
6个月前
已完结
Mass production adoption of EUV pellicle: methodology for evaluation and validation
6个月前
已完结
Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: a critical review
9个月前
已完结
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