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38 积分 2023-12-07 加入
Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: a critical review
2天前
已完结
Development of a porous patterned membrane with a large field size for EUV pellicles
1个月前
已完结
Study on the multi layers for EUV pellicle
1个月前
已完结
A novel solution for next-generation EUV pellicle: breathable membrane with increased transmittance
1个月前
已完结
Fracture of multilayer soft materials
5个月前
已完结
Thermal stress concentration points and stress mutations in nano-multilayer film structures
5个月前
已完结
Structure, mechanical properties and tribological behavior of sp2-C:Ti/sp3-C:Ti multilayer films deposited by magnetron sputtering
5个月前
已完结
Stress mechanism analysis by finite element method for different dielectric films deposited with ion-beam assisted deposition on flexible substrates
5个月前
已完结
Thermal analysis of extreme ultraviolet pellicle with metallic coatings
5个月前
已关闭
A possible wafer heating during EUV exposure
5个月前
已完结
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