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10 积分 2023-06-25 加入
Improving Tungsten gap-fill for advanced contact metallization
15小时前
待确认
Simultaneous Co-localized TiO2 Etching and W Atomic Layer Deposition Using WF6 as a Dual-Functional Reactant
16小时前
已完结
Pulsed CVD of Tungsten Thin Film as a Nucleation Layer for Tungsten Plug-Fill
2个月前
已完结
Characterization of CVD tungsten deposited by silane reduction
3个月前
已完结
Controllable syntheses of two structurally new {AsW9O33}-mediated silver alkynyl clusters
9个月前
已完结
Gas-phase reactions of WF6with SiH4for deposition of WSinfilms free from powder formation
9个月前
已完结
Modeling of Tungsten Thermal Chemical Vapor Deposition
9个月前
已完结
Prevention of adhesion failure of a W/TiN/Ti(Co) layer on SiO2
9个月前
已完结
Modeling of Tungsten Thermal Chemical Vapor Deposition
9个月前
已完结
CVD and precursor chemistry of transition metal nitrides
10个月前
已完结
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