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Study on the Discharge Characteristics of Low-Pressure Magnetized Capacitively Coupled Ar/CH₄ Plasma
6天前
已完结
Electron density and temperature of dual-frequency capacitively coupled argon plasma in two-dimensional distribution obtained and studied in experiment
1个月前
已完结
Effect of radio-frequency power levels on electron density in a confined two-frequency capacitively-coupled plasma processing tool
1个月前
已完结
Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
1个月前
已完结
Numerical simulation of dual frequency etching reactors: Influence of the external process parameters on the plasma characteristics
1个月前
已完结
Electrode impedance effect in dual-frequency capacitively coupled plasma
1个月前
已完结
Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas
1个月前
已完结
On electron heating in a low pressure capacitively coupled oxygen discharge
2个月前
已完结
Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas
2个月前
已关闭
Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual-frequency capacitively coupled argon plasma
2个月前
已完结
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