Lv61
1970 积分 2022-08-12 加入
Influence of oxygen flow on the structure, chemical composition, and dielectric strength of AlxTayOz thin films deposited by pulsed-DC reactive magnetron sputtering
2个月前
已完结
Convergence during feedback controlled reactive magnetron sputtering: Mechanisms and classification
2个月前
已完结
Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films
2个月前
已完结
In-situ detection method for wafer movement and micro-arc discharge around a wafer in plasma etching process using electrostatic chuck wafer stage with built-in acoustic emission sensor
2个月前
已关闭
High-NA EUV lithography: pushing the limits
4个月前
已完结
Dielectric phenomena in solids : with emphasis on physical concepts of electronic processes
5个月前
已完结
皖公网安备34019202002308
