Lv31
310 积分 2025-12-12 加入
Study on radial uniformity of large aperture capacitively coupled plasma
1个月前
已完结
Numerical investigation on electrical characterization of a capacitive coupled radio-frequency plasma
1个月前
已完结
Time-varying mechanism of ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma
8个月前
已完结