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Faster, Smaller, Deeper: the Challenges of High Aspect Ratio Etching
15分钟前
求助中
Enhanced plasma resistance of uniform ALD-Y2O3 thin films for chamber components’ coatings
2个月前
已完结
Plasma Erosion Behavior of Yttrium Oxide film formed by Aerosol deposition Method
2个月前
已完结
Microstructure and plasma corrosion behavior of yttria coatings prepared by the aerosol deposition method
2个月前
已完结
Plasma-Resistant Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process
2个月前
已完结
Fluid Simulation of the Plasma Characteristics in an Inductively Coupled Plasma Source with Planar and Cylindrical Coils
3个月前
已完结
Plasma resistant glass (PRG) for reducing particulate contamination during plasma etching in semiconductor manufacturing: A review
4个月前
已完结
Review of the penetration resistance performance of lightweight ceramic composite armor under high-speed impact
8个月前
已完结
Classification of fundus diseases based on meta-data and EB-IRV2 network
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