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356 积分 2023-09-25 加入
Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems
13小时前
已完结
Process optimization and characterization of dielectric, piezoelectric, and ferroelectric properties of 30% ScAlN thin films
9天前
已完结
Preparation of AlN thin films by reactive sputtering and optical emission spectroscopy during sputtering
21天前
已完结
Low temperature sputtering deposition of Al1−xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar + N2) reactive atmosphere
21天前
已完结
Effect of N2-flow on nitrogen vacancies, leakage, and polarization switching in sputtered ferroelectric AlScN films
21天前
已完结
Stress control in reactively sputtered AlN and TiN films
1个月前
已完结
Stress-related phenomena in reactively dc-magnetron-sputtered aluminum nitride thin films
1个月前
已完结
THE BOND STRENGTH MEASUREMENT OF SILICON-SILICON BONDING WAFERS BASED ON CRACK OPENING METHOD
1年前
已完结
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