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166 积分 2025-04-24 加入
Area selective deposition of ruthenium on 3D structures
13天前
已关闭
Reaction mechanism studies on atomic layer deposition process of AlF3
2个月前
已完结
Plasma-enhanced atomic layer deposition of elemental niobium thin films
2个月前
已完结
Role of dose optimization in Ru atomic layer deposition for low resistivity films
2个月前
已完结
Fluorine-free tungsten films as low resistance liners for tungsten fill applications
2个月前
已完结
Atomic layer deposition of molybdenum carbide and substrate-dependent reduction to metallic molybdenum
2个月前
已完结
ALD Mo for Advanced MOL Local Interconnects
2个月前
已完结
Structure-Inhibition Relationship of Vapor-Deposited Alkylsilane Monolayers in Area-Selective Atomic Layer Deposition
3个月前
已完结
A Liquid Ruthenium Precursor for Atomic Layer Deposition of Low-Resistivity Ruthenium Films
3个月前
已完结
Oxidant-driven growth and crystallization of MoOx in H2-gas-free thermal atomic layer deposition using a high-volatility liquid Mo precursor
3个月前
已关闭
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