Lv31
273 积分 2021-05-13 加入
Enhancing the PMMA Photoresist Film via Ozone Treatment and Vapor Phase Infiltration
10天前
已完结
An aluminum-based hybrid film photoresist for advanced lithography by molecular layer deposition
10天前
已完结
Atomic Layer Deposition and Vapor Phase Infiltration
10天前
已完结
Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films
29天前
已完结
Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges
1个月前
已完结
Preparing for the Next Generation of EUV Lithography at the Center for X-ray Optics
1个月前
已完结
R&D Activities of EUV Lithography at NewSUBARU, and Possibility of Beyond EUV
1个月前
已关闭
Post-directed-self-assembly membrane fabrication forin situanalysis of block copolymer structures
1个月前
已完结
Probing morphology and chemistry in complex soft materials with in situ resonant soft x-ray scattering
1个月前
已完结
Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists
1个月前
已完结