Lv42
501 积分 2021-05-13 加入
Sub‐10‐nm Lithography for Sn4–Oxo Clusters: Effect of Molecular Polarity on Sensitivity and Resolution
10小时前
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Effect of Molecular Structure on Depth Profile of Acid Generator Distribution in Chemically Amplified Resist Films
4天前
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X-ray Reflectivity Study on Depth Profile of Acid Generator Distribution in Chemically Amplified Resists
4天前
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Influence of Chemical Structures on E-Beam Lithography Performance of Polysilsesquioxanes
4天前
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In Situ Analysis of Electron-Induced Chemical Transformations in Vapor-Phase-Synthesized Al-Based InorganicOrganic Hybrid Thin Films for EUV Resist Platform
4天前
已完结
Nanoscale molecular analysis of photoresist films with massive cluster secondary-ion mass spectrometry
4天前
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Understanding photoacid generator distribution at the nanoscale using massive cluster secondary ion mass spectrometry
4天前
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Photoresist film analysis to investigate LWR generation mechanism
4天前
已完结
Examining the Molecular Composition of Sub-10-nm Domains With Nano-Projectile Secondary Ion Mass Spectrometry
4天前
已完结
Formation of deprotected fuzzy blobs in chemically amplified resists
4天前
已完结