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348 积分 2023-10-30 加入
Enhancing the thermal responsivity of microelectromechanical system beam resonators by preloading a critical buckling strain
2天前
求助中
Effect of buckling on the thermal response of microelectromechanical beam resonators
2天前
已完结
Lorentz force based resonant MEMS magnetic-field sensor with optical readout
9天前
已完结
Micro string resonators as temperature sensors
14天前
已完结
High resolution microresonator-based digital temperature sensor
14天前
已完结
Design and fabrication of a high performance resonant MEMS temperature sensor
16天前
已完结
Bent-beam sensing with triple-beam tuning forks
23天前
已完结
Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm
27天前
已完结
Piezoelectric actuator generating torsional displacement from piezoelectric d15 shear response
1个月前
已完结
Bent-beam sensing with triple-beam tuning forks
3个月前
已完结