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18 积分 2026-07-27 加入
Optimization of ion energy distribution and ion angular distribution by tuning chamber radius in inductively coupled plasma etching
2小时前
求助中
Synergistic enhanced oxygen pulsed discharge by surface micro-groove structures at atmospheric pressure
2小时前
求助中
Optimization of O2/N2 inductively coupled plasma ashing: Role of total gas flow rate and nitrogen addition on uniformity and rate
1个月前
已完结
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