Lv2
120 积分 2023-10-11 加入
Deposit and etchback approach for ultrathin Al2O3 films with low pinhole density using atomic layer deposition and atomic layer etching
2天前
已完结
Molybdenum Thin Film Formation from Molybdenum Nitride Deposited by Plasma-enhanced Atomic Layer Deposition with Hydrogen-permeable Mechanical Capping Layer
25天前
已完结
Atomic layer processing of MoS2
1个月前
已完结
Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride
1个月前
已完结
Atomic layer etching of titanium nitride with surface modification by Cl radicals and rapid thermal annealing
1个月前
已完结
Cyclic Atomic Layer Etching of PdSe2
1个月前
已完结
Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching
1个月前
已完结
Atomic layer etching of high-k oxide thin films using hexafluoroacetylacetone and oxygen radicals
1个月前
已完结
Reactions of molybdenum pentachloride with oxygen and nitrogen donor ligands
1个月前
已关闭
Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
2个月前
已完结
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