Lv2
128 积分 2023-10-11 加入
NF3 plasma-enhanced isotropic atomic layer etching of amorphous and crystalline hafnium oxide films
4个月前
已完结
Control of etch profiles in high aspect ratio holes via precise reactant dosing in thermal atomic layer etching
6个月前
已完结
Surface chemical changes of aluminum during NF3-based plasma processing used for in situ chamber cleaning
8个月前
已完结
CF4 plasma-based atomic layer etching of Al2O3 and surface smoothing effect
8个月前
已完结
Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition
8个月前
已完结
Self-Limited Behavior Study on Dielectric Quasi-Atomic Layer Etching for Selectivity Achievement
9个月前
已关闭
Rapid Extraction of the Dielectric Constant of Atomically Thin ZrO2 Prepared through Atomic Layer Deposition and Atomic Layer Etching
9个月前
已完结
Atomic layer etching of ZrO2 thin films for DRAM capacitors using NF3 plasma and TiCl4
9个月前
已完结
Line width narrowing of superconducting nanowire single photon detectors using atomic layer etching
9个月前
已关闭
Plasma atomic layer etching of tantalum nitride with surface fluorination and Ar ion sputtering
9个月前
已完结
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