Lv4
668 积分 2024-06-25 加入
Driver wavelength and intensity dependence of extreme ultraviolet emission from laser-produced tin microdroplet plasmas
5天前
已完结
Pinch-plasma radiation source for extreme-ultraviolet lithography with a kilohertz repetition frequency
5天前
已完结
Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma
5天前
已完结
Physical properties of the HCT EUV source
9天前
已完结
Fundamentals and limits for the EUV emission of pinch plasma sources for EUV lithography
20天前
已完结
Physical properties of the HCT EUV source
20天前
已完结
Finite Element Simulation on the Distribution of Discharge Gas in Hollow Cathode Plasma
20天前
已完结
Etching characteristics of tungsten and tungsten compounds by energetic fluorocarbon and argon ions
1个月前
已关闭
Diode-pumped Tm:YLF MOPA system delivering 713 mJ pulse energy with near-diffraction-limited beam quality
1个月前
已完结
Etching characteristics of tungsten and tungsten compounds by energetic fluorocarbon and argon ions
1个月前
已关闭
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