Lv3
348 积分 2025-09-26 加入
The role of the pattern feature space signature to train etch machine learning model from single pattern SEM contours
21小时前
待确认
Can remote SEM contours be used to match various SEM tools in fabs?
22小时前
已完结
CDSAXS study of 3D NAND channel hole etch pattern edge effects and etched hole pattern variance
1天前
已完结
3D reconstruction of 3D NAND memory etch profiles using FIB-SEM: identifying variances in etched hole patterns
1天前
已完结
Enhancing CD-SEM accuracy with attention-boosted Noise2Noise model
2天前
待确认
Future of plasma etching for microelectronics: Challenges and opportunities
7天前
已完结
TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process
7天前
已完结
Fast etch recipe creation with automated model-based process optimization
8天前
已完结
Precise and practical 3D topography simulation of high aspect ratio contact hole etch by using model optimization algorithm
8天前
已完结
Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. I. Modeling framework and simulation
8天前
已完结
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