Lv2
168 积分 2024-10-24 加入
Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures
18天前
已完结
Amorphous Carbon Nitride Films: Surface and Subsurface Composition and Bonding
18天前
已完结
Adhesion Strength of Amorphous Carbon Films Deposited on a Trench Sidewall
18天前
已完结
Oriented sp2 bonded carbon structure of hydrogenated amorphous carbon films
18天前
已完结
Bonding structure and dry etching characteristics in amorphous B–C–N fflms for hardmask applications
1个月前
已完结
新型碳材料表面元素及化学态高分辨XPS定量研究
1个月前
已完结
Modification of the Ratio between sp2- to sp3-Hybridized Carbon Components in PECVD Diamond-Like Films
1个月前
已完结
Etching characteristics of hydrogenated amorphous carbon with different sp2/sp3 hybridization ratios in CF4/O2 plasmas
1个月前
已完结
Boron-doped amorphous carbon deposited by DC sputtering for a hardmask: Microstructure and dry etching properties
1个月前
已完结
Removing overhang and increasing atom re-deposition of sputtering to enable gap-filling scalability
1个月前
已完结
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