Lv11
56 积分 2026-04-16 加入
Multiscale modeling of plasma–surface interaction—General picture and a case study of Si and SiO2 etching by fluorocarbon-based plasmas
6小时前
待确认
Dynamics of EUV-induced plasma adjacent to an electrostatic chuck
3个月前
已关闭
Precise control of ion energy distributions by high frequency pulsed voltage waveforms in inductively coupled plasmas
4个月前
已完结
Modification of inductively coupled plasma characteristics by introducing a metal grid
4个月前
已完结
Abnormal behavior of the plasma potential in an inductively coupled plasma with a DC-biased grid
4个月前
已完结
感应耦合等离子体中最佳等离子体生成的实验研究
4个月前
已关闭
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