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200 积分 2022-09-06 加入
Plasma processing of low-k dielectrics
1小时前
已完结
Plasma processing of low-k dielectrics
1小时前
已完结
Plasma damage mechanisms for low-k porous SiOCH films due to radiation, radicals, and ions in the plasma etching process
1小时前
已完结
Silicon Damage Mechanism In Oxide Etch
7天前
已完结
Plasma damage evaluation of an integrated in-situ directional resist stripping process in magnetically enhanced RIE etcher for dual damascene application
7天前
已完结
Prevention of plasma induced damage on thin gate oxide of HDP oxide deposition, metal etch, Ar preclean processing in BEOL sub-half micron CMOS processing
7天前
已完结
Plasma damage mechanisms for low-k porous SiOCH films due to radiation, radicals, and ions in the plasma etching process
7天前
已完结
An Overview of Dry Etching Damage and Contamination Effects
7天前
已完结
Mechanism of porous low-k film damage induced by plasma etching radicals
7天前
已完结
Polyoxometalated metal-organic framework superstructure for stable water oxidation
2个月前
已完结
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