Lv4
484 积分 2022-05-26 加入
Logic patterning and roughness improvement applications with directional ion beam etch
1个月前
已完结
How to achieve tip-to-tip patterning beyond the resolution limit: gas cluster beam (GCB) directional etch for sub-15nm T2T metal PnR with 0.33 NA EUV single print
1个月前
已完结
3D model assessment of a directional etch patterning process
1个月前
已完结
Pattern-shaping technology enables improvements of logic layouts patterning beyond 15nm tip-to-tip
1个月前
已完结
Plasma Science and Technology - Basic Fundamentals and Modern Applications
5个月前
已关闭
Plasma Damage on Low-k Dielectric Materials
5个月前
已完结
Non-damaging chemical photoresist strip process for copper/low-k interconnects
6个月前
已关闭
A Study of Dry Etching Characteristics of Polyimide Films in Flexible Displays with Trench Structures
8个月前
已关闭
Improved patterning quality of SU-8 microstructures by optimizing the exposure parameters
8个月前
已完结
Multistep profiles by mix and match of nanoimprint and UV lithography
8个月前
已关闭
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