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40 积分 2025-11-23 加入
Co-Integration of Si-Channel nMOS and SiGe-Channel pMOS GAA Transistors Using the Novel Dual-Channel Selective Release Scheme
5个月前
已完结
Kinetics model for thermal selective etching of Si1−xGex in F2/Ar
5个月前
已完结
Investigation of atomically flat surface Ge0.8Si0.2/Ge superlattice epitaxial and high-selectivity stacked Ge0.8Si0.2 nanosheet release
5个月前
已完结
Effect of Polymer Type Additives in Selective Wet Etching of Si1-XGex- to Si-Film to Enhance Etch Rate Selectivity
5个月前
已关闭
Modeling Non-Uniformity During Two-Step Dry Etching of Si/SiGe Stacks for Gate-All-Around FETs
5个月前
已完结
Enhancement of selective SiGe dissolution through facilitated surface oxidation by formation of hydroxyl radicals in peracetic acid solution
5个月前
已完结
Control of selective SiGe etching by enhanced formation of hydroxyl radicals and by surface passivation in peracetic acid solution
5个月前
已完结
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