Lv5
928 积分 2025-04-15 加入
A computational study for screening high-selectivity inhibitors in area-selective atomic layer deposition on amorphous surfaces
1天前
已关闭
Selective Gas-Phase Functionalization of SiO2 and SiNx Surfaces with Hydrocarbons
1天前
已完结
Functionalization of Si3N4 with an aldehyde inhibitor for area selective deposition of HfO2 and SiO2
1天前
已关闭
Functionalization of the SiO2 Surface with Aminosilanes to Enable Area-Selective Atomic Layer Deposition of Al2O3
1天前
已完结
Inherently Area‐Selective Atomic Layer Deposition of SiO2 Thin Films to Confer Oxide Versus Nitride Selectivity
4天前
已完结
Single-Step, Spin-on Process for High Fidelity and Selective Deposition
4天前
已完结
Area-Selective Atomic Layer Deposition of Al2O3 with a Methanesulfonic Acid Inhibitor
4天前
已完结
Thermal Atomic Layer Etching of Al2O3 Using Sequential HF and BCl3 Exposures: Evidence for Combined Ligand-Exchange and Conversion Mechanisms
4天前
已完结
Area-selective atomic layer deposition of Al2O3 on SiNx with SiO2 as the nongrowth surface
4天前
已完结
Selective deposition of AlOx for Fully Aligned Via in nano Cu interconnects
4天前
已关闭
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