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30 积分 2023-10-29 加入
Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism
7小时前
求助中
Stacked DRAM Solution: Multilayer Horizontal Cell (MHC) 1T1C DRAM
11小时前
已完结
Evaluation of etching performance of single etching gases for high-κ films
1个月前
已完结
Cyclic Etching of SiGe/Si Multilayers with Fluorine Chemistry for 3D DRAM Applications
1个月前
已完结
A First-Principles Mechanistic Study of Thermal Selective Etching of SiGe and Si with Fluorine-Containing Etchants
1个月前
已完结
面向3纳米以下技术代CMOS器件先导刻蚀工艺及关键技术研究
5个月前
已完结
Atomic layer etching of SiCO films with surface modification by O2 and CF4/NH3/Ar plasmas and desorption by IR annealing
8个月前
已关闭
Atomic layer etching of Si3N4 with high selectivity to SiO2 and poly-Si
8个月前
已完结
Atomic layer etching of SiCO films with surface modification by O2 and CF4/NH3/Ar plasmas and desorption by IR annealing
8个月前
已关闭
Study of precisely controlled selective isotropic quasi-ALE of SiGe
8个月前
已完结
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