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50 积分 2026-02-11 加入
Mechanisms underlying temperature uniformity in electrostatic chucks through experimental and simulation methods
2个月前
已完结
Yttrium-doped aluminum nitride ceramics for dielectric layers in Johnsen-Rahbek (J-R) type electrostatic chucks
2个月前
已完结
Laser Ablation and Surface Modification-Assisted Polishing of Polycrystalline Diamond: From Mechanisms of Ablation and Phase Transition to High-Efficiency Processing
5个月前
已完结
聚氨酯发泡材料在化学机械抛光中的应用进展
7个月前
已完结