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Yttrium-doped aluminum nitride ceramics for dielectric layers in Johnsen-Rahbek (J-R) type electrostatic chucks
3小时前
待确认
Laser Ablation and Surface Modification-Assisted Polishing of Polycrystalline Diamond: From Mechanisms of Ablation and Phase Transition to High-Efficiency Processing
3个月前
已完结
聚氨酯发泡材料在化学机械抛光中的应用进展
4个月前
已完结
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