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830 积分 2025-04-18 加入
Effects of Process to Material Removal in CMP: Modelling and Experiments
2天前
已完结
MEMS Pressure Sensors Design, Simulation, Manufacturing, Interface Circuits: A Review
15天前
已完结
Experimental and Theoretical Study on Anisotropic Electron Mobility in 4H‐SiC
18天前
已完结
Precision Deep Reactive Ion Etching of Monocrystalline 4H-SiCOI for Bulk Acoustic Wave Resonators with Ultra-Low Dissipation
1个月前
已完结
High-Sensitivity 4H-Silicon Carbide MEMS Pressure Sensors for Extreme Temperature Ranges of -75 °C to 600 °C
1个月前
已完结
Development of Laser-Micromachined 4H-SiC MEMS Piezoresistive Pressure Sensors for Corrosive Environments
1个月前
已完结
Fabrication of 4H-SiC piezoresistive pressure sensor for high temperature using an integrated femtosecond laser-assisted plasma etching method
1个月前
已完结
4H-Silicon Carbide as an Acoustic Material for MEMS
1个月前
已完结
High Temperature Characteristics of Piezoresistive Silicon Carbide Pressure Sensors Implemented by Leadless Packaging
1个月前
已完结
Advances in High-Aspect-Ratio Deep Reactive Ion Etching of 4H-Silicon Carbide Wafers
1个月前
已完结
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