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26 积分 2023-11-15 加入
Tin-oxo nanoclusters for extreme ultraviolet photoresists: Effects of ligands, counterions, and doping
5天前
已完结
Additive-Assisted Forming High-Quality Thin Films of Sn–Oxo Cluster for Nanopatterning
5天前
已完结
Balancing sensitivity and resolution by feedback regulation of free radicals from Sn-C bonds in tin-oxygen clusters EBL photoresist
5天前
已完结
Synthesis and Characterizations of a Nonalkyl Tin Oxo Cluster and its Application as High EUV Absorption Coefficient and Etch Resistant Inorganic Resist for EUV Lithography
10天前
已完结
Computational Study of Organotin Oxide Systems for Extreme Ultraviolet Photoresist
16天前
已完结
Insight into the evolution upon ionization from tin-oxo cage photoresist and counterions by DFT calculation
16天前
已完结
Mechanistic Advantages of Organotin Molecular EUV Photoresists
16天前
已完结
Stability studies on a sensitive EUV photoresist based on zinc metal oxoclusters
18天前
已完结
The forgotten chemistry of group(IV) metals: A survey on the synthesis, structure, and properties of discrete Zr(IV), Hf(IV), and Ti(IV) oxo clusters
19天前
已完结
Single Rare-Earth Ion Doped Tin-Oxo Nanocluster Photoresists for High-Resolution Extreme Ultraviolet Lithography
20天前
已完结
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