Lv21
152 积分 2024-05-29 加入
Optimization of EUV patterning using computational lithography for large-area stochastic hot spot prediction
4小时前
已完结
Scaling single expose EUV gate LER through source-resist-mask co-optimization
5天前
已完结
Machine learning-based 3D resist model
7天前
已完结
Thermal cycling–induced nitriding increases energy-storage density in titanate ferroelectric films
9天前
已完结
3-D finite element simulation of wafer thermal distortion and stress fields in exposure process
26天前
已完结
Finite element analysis of SCALPEL wafer heating
26天前
已完结
Wafer heating analysis for electron-beam projection lithography
26天前
已完结
Comparison of EUV and optical device wafer heating
27天前
已完结
Design of DPP EUV exposure detection device
1个月前
已完结
Image twist and placement error during EUV exposure
1个月前
已完结
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