Lv2
152 积分 2024-05-29 加入
Inverse lithography source and mask optimization via Bayesian compressive sensing
1个月前
已完结
Optimization of EUV patterning using computational lithography for large-area stochastic hot spot prediction
1个月前
已完结
Scaling single expose EUV gate LER through source-resist-mask co-optimization
1个月前
已完结
Machine learning-based 3D resist model
1个月前
已完结
Thermal cycling–induced nitriding increases energy-storage density in titanate ferroelectric films
1个月前
已完结
3-D finite element simulation of wafer thermal distortion and stress fields in exposure process
2个月前
已完结
Finite element analysis of SCALPEL wafer heating
2个月前
已完结
Wafer heating analysis for electron-beam projection lithography
2个月前
已完结
Comparison of EUV and optical device wafer heating
2个月前
已完结
Design of DPP EUV exposure detection device
2个月前
已完结
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