Lv31
242 积分 2023-12-19 加入
3D lumped parameter model for lithographic simulations
1小时前
已完结
Resist shrinkage during development: rigorous simulations and first compact model for OPC
8个月前
已完结
Photoresist development as a reaction-diffusion process (Conference Presentation)
8个月前
已关闭
Simulation of locally enhanced three-dimensional diffusion in chemically amplified resists
10个月前
已完结
Slurry selectivity influence on STI and POP processes for RMG application
1年前
已完结
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