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Stress Measurement in Thin Films Using Wafer Curvature: Principles and Applications
3天前
已完结
Intrinsic Mechanical Properties of Free-Standing SiNx Thin Films Depending on PECVD Conditions for Controlling Residual Stress
9天前
已完结
Global optimization of process parameters for low-temperature SiNx based on orthogonal experiments
9天前
已完结
Response Surface Methodology: Process and Product Optimization Using Designed Experiments
13天前
已完结
Statistics for Experimenters
13天前
已完结
Analysis of Piezoresistive Effects in Silicon Structures Using Multidimensional Process and Device Simulation
13天前
已完结
Design and Analysis of Experiments
13天前
已完结
Analysis and simulation of semiconductor devices
13天前
已完结
Global optimization of process parameters for low-temperature SiNx based on orthogonal experiments
1个月前
已完结
Spectroscopic Analysis of Film Stress Mechanism in PECVD Silicon Nitride
1个月前
已完结